厦门大学萨本栋微米纳米科学技术研究导师介绍：伞海生

  伞海生
  教授、博士生导师
  联系电话：0592-2181340
  电子邮件：sanhs@xmu.edu.cn
  地址：厦门大学亦玄馆403室
  1993年毕业于西南科技大学，获机械制造专业工学学士学位。同年在甘肃建筑材料工业学校任教。2001年在兰州大学物理科学与技术学院攻读硕士学位。2004年在中科院半导体所攻读博士学位（与兰州大学联合培养）。2006年博士毕业，获材料物理专业工学博士学位。同年到厦门大学物理机电学院从事博士后研究，2008年出站并留校任教。2013年在挪威科技大学和Vestfold大学微系统研究中心做访问学者。主要在微器件与微系统领域开展研究, 并承担国家自然基金面上项目、福建省产研重大项目、厦门市科技计划项目和多项航空集团所属单位科研项目等。迄今为止发表SCI和EI收录文章50多篇，申请专利10项。
  代表性成果（近五年）
  1. Wireless passive polymer-derived SiCN ceramic sensor with integrated resonator/antenna. Applied Physics Letters, Vol.103(16), pp. 1-5, 2013.
  2. Silicon-glass-based single piezoresistive pressure sensors for harsh environment applications. Journal of Micromechanics and Microengineering. Vol.23,pp. 075020 (8pp), June, 2013.
  3. Self-Packaging Fabrication of Silicon-Glass-Based Piezoresistive Pressure Sensor. IEEE Electron Device Letters, Vol. 34, No. 6, pp.789-791, June 2013.
  4. Design and simulation of GaN based Schottky betavoltaic nuclear micro-battery. Applied Radiationand Isotopes, Vol.80, pp.17-22, June. 2013.
  5. Silicon-Based Micro-Machined Infrared Emitters with a Micro-Bridge and a Self-Heating Membrane Structure. IEEE Photonics Technology Letters, Vol. 25, No. 11, pp.1014-1016, June, 2013.
  6. A high open-circuit voltage gallium nitride nuclear betavoltaic microbattery. Journal of Micromechanics and Microengineering, Vol.22(7), pp.074011, 2012.
  7. Design and Simulation of Betavoltaic Battery Using Large-grain Polysilicon. Applied Radiation and Isotopes, Vol.70(10), pp 2388-2394, 2012.
  8. 适用于恶劣环境的压阻式压力传感器. 光学精密工程, Vol.20(03), pp.550-555, 2012.
  9. Study on dielectric charging in low-stress silicon nitride with the MIS structure for reliable MEMS applications. Journal of Micromechanics and Microengineering, Vol.21, 125019 (6pp), 2011.
  10. MEMS-based plasmon infrared emitter with hexagonal hole arrays perforated in the Al-SiO2-Si structure. Journal of Micromechanics and Microengineering, Vol.21, Page: 105023, 2011.
  11. Demonstration of a High Open-Circuit Voltage GaN Betavoltaic Microbattery. Chinese Physics Letters, Vol. 28, No.7, 078401(4pp), 2011.
  12. High open-circuit voltage betavoltaic cell- based on GaN p-i-n homojunction. Electronics Letters, Vol.47, No.12, pp. 720-722, 2011.
  13. 基于绝缘体上硅晶片的微机电系统红外光源. 光学学报, Vol.30(5), pp.1455-1458, 2010.
  14. Charging and discharging in ion implanted dielectric films used for capacitive radio frequency microelectromechanical systems switch. Journal of Applied Physics, Vol.105, pp.124503, 2009.
  15. MEMS hybrid power generator from vibration energy. Optics and Precision Engineering, Vol. 17(6), 1262-1266, Jun. 2009.
  16. Using metal-insulator-semiconductor structure to investigate dielectric charging in capacitive RF MEMS switches, Applied Physics Letter, Vol. 93 (6), pp.063506, 2008.
  获奖和申请专利
  1. 2010年厦门市科学技术进步奖三等奖-汽车工业用MEMS传感器和产业化及微纳制造产业化平台建设,省部级科研奖, 2010年04月, 厦门市。
  2. 6.18海峡两岸职工创新成果展金奖-硅基MEMS红外光源, 2010年06月, 厦门市。
  3. 硅-玻璃基粱膜结构的超微压力传感器芯片及制造方法, 201310220562.2, 2013. 06.
  4. 岛膜自封装结构的硅-玻璃微压力传感器芯片及制作方法, 201310220922.9, 2013. 06.
  5. 一种具有自封装结构的贴片式单电阻压阻式压力传感器, 201210529953.8, 2012. 12.
  6. 一种压电-静电复合式微机械振动能量收集器及制造方法, 201210016196.4, 2012.01.
  7. 基于压电静电的复合式振动能量收集器, 201210016068.X, 2012.01.
  8. 一种可调整降低正交误差的微陀螺仪, ZL201110037429.4, 2012.12.
  9. 复合型微能源系统及其制备方法, ZL200810070682.4, 2011.04.
  10. 一种外光源及其制备方法, ZL200810070672.4, 2008.08.
  11. 具有微波光子晶体结构接地层的高速印刷电路板ZL200510011210.1, 2006.07.
  12. 微波光子晶体在高速光电子器件封装中的应用 ZL200510055278. 2006.09.